H01J 37/16
Vessels
Official title: Vessels; Containers
H01J37/16 (Vessels) appears on 325 US grants and 374 published applications in this corpus.
Search patents in H01J- Granted patents
- 325
- Published applications
- 374
- Assignees
- 148
- Inventors
- 925
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 3 | 0 |
| 1983 | 2 | 0 |
| 1984 | 5 | 0 |
| 1985 | 2 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 2 | 0 |
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 3 | 0 |
| 2002 | 1 | 2 |
| 2003 | 1 | 5 |
| 2004 | 5 | 5 |
| 2005 | 2 | 2 |
| 2006 | 2 | 7 |
| 2007 | 5 | 7 |
| 2008 | 4 | 11 |
| 2009 | 7 | 14 |
| 2010 | 4 | 14 |
| 2011 | 12 | 10 |
| 2012 | 7 | 13 |
| 2013 | 11 | 18 |
| 2014 | 21 | 20 |
| 2015 | 20 | 39 |
| 2016 | 26 | 21 |
| 2017 | 22 | 25 |
| 2018 | 25 | 16 |
| 2019 | 19 | 14 |
| 2020 | 26 | 21 |
| 2021 | 14 | 20 |
| 2022 | 8 | 11 |
| 2023 | 15 | 20 |
| 2024 | 12 | 16 |
| 2025 | 12 | 24 |
| 2026 | 13 | 19 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Focused ion beam apparatus and control method thereof29 Sep 2026US 12,749,647 B2Samsung Electronics Co., Ltd.
- Electron beam irradiation device18 Aug 2026US 12,712,143 B2Nhv Corporation
- Physical package for optical lattice clock11 Aug 2026US 12,704,816 B2JEOL Ltd.
- Air bearing shaft with wide operating temperature range11 Aug 2026US 12,706,271 B2APPLIED Materials.Inc.
- Charged particle beam device and vibration-suppressing mechanism4 Aug 2026US 12,700,564 B2Hitachi High-Tech Corporation
- Charged particle beam devices and membrane assemblies useful therein8 Oct 2026US 2026/0311957 A1Airsem Technologies Ltd.
- Modular metrology apparatus for interchangeable process modules10 Sep 2026US 2026/0269171 A1
- Multipole magnet adjustment system and multipole magnet adjustment method13 Aug 2026US 2026/0237591 A1Kabushiki Kaisha Toshiba
- Method for operating a particle beam system, and particle beam system13 Aug 2026US 2026/0237592 A1
- System and method for a workstation for handling electron microscopy specimens in variable environments16 Jul 2026US 2026/0204512 A1Simple Origin, Inc.
Most cited
By later US patents
- High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation528US 7,476,291 B2Lam Research Corporation · 2009
- Object-processing apparatus controlling production of particles in electric field or magnetic field380US 8,051,799 B2Renesas Electronics Corporation · 2011
- Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support348US 5,820,723 ALam Research Corporation · 1998
- Adjustable electrode plasma processing chamber345US 4,340,462 ALam Research Corporation · 1982
- Gasket with positioning feature for clamped monolithic showerhead electrode166US 8,272,346 B2Lam Research Corporation · 2012