US 4,340,462 A · Adjustable electrode plasma processing chamber

Abstract

A plasma processing chamber incorporating parallel plate electrodes whose separation may be mechanically adjusted from the outside thereof. The chamber includes a sealable assembly including an electrode housing and a reaction chamber body. The body includes an aperture to receive a planar surfaced terminal end of the housing. The aperture is constructed to permit the housing to be easily translated with respect to the body. One electrode surface of the chamber is established on the end of the housing thus received. The other electrode is provided by a corresponding surface within the body. Entry of atmospheric gases into the space between the electrode's surfaces is barred by a sliding, dual, differentially pumped seal between the housing's surface and the aperture's surface. Also incorporated into the processing chamber are four jackscrews aligned parallel to the axis of the housing. These jackscrews, arranged to form a square about the housing, are interposed between the body and a flange projecting radially outward from the housing's terminal end furthest from the body. Synchronous rotation of these jackscrews, provided by a continuous, closed chain passing around sprockets secured to each of the jackscrews, moves the housing with respect to the body thereby altering the electrode's separation. A potentiometer, also driven in synchronism with the jackscrews, permits remote, electronic sensing of electrode spacing.

Claims12

Dependent claims

An adjustable electrode plasma processing chamber comprising:

a sealable assembly including an electrode housing having a first electrode formed at one terminal end thereof and a reaction chamber body having formed therein a second electrode and an aperture for receiving and sealing about said first electrode terminal end of said electrode housing, said electrodes being electrically insulated from one another and positioned adjacent to one another to establish a plasma reaction region between adjacent surfaces thereof, said electrode housing and said reaction chamber body being moveable with respect to each other for changing said separation distance of said adjacent surfaces of said electrodes, the assembly being adapted to receive a workpiece within said plasma reaction region, the assembly further including a workpiece transfer aperture to allow a workpiece to enter or exit the plasma reaction region, a processing gas inlet aperture for infusing plasma processing gases into the plasma reaction region and an exhaust aperture for removing gases from the plasma reaction region;
and
an electrode positioning means for moving said electrode housing with respect to said reaction chamber body whereby said separation distance between adjacent surfaces of said electrodes may be controlled, the positioning means being operable from outside the sealed plasma processing chamber.

Dependencies are inferred from the claim text.

Adjustable electrode plasma processing chamber

Life of this patent

Adjustable electrode plasma processing chamber

Life of this patent

Abstract

Claims12