H01J 2237/30494
Vector scan
H01J2237/30494 (Vector scan) appears on 17 US grants and 10 published applications in this corpus.
Search patents in H01J- Granted patents
- 17
- Published applications
- 10
- Assignees
- 14
- Inventors
- 54
- Latest grant
- 11 Mar 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 2 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 1 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 2 | 2 |
| 2008 | 0 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 1 |
| 2011 | 0 | 0 |
| 2012 | 1 | 1 |
| 2013 | 0 | 0 |
| 2014 | 2 | 0 |
| 2015 | 1 | 1 |
| 2016 | 1 | 0 |
| 2017 | 1 | 0 |
| 2018 | 0 | 0 |
| 2019 | 0 | 1 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 1 | 2 |
| 2023 | 2 | 1 |
| 2024 | 0 | 0 |
| 2025 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Charged particle beam writing method and charged particle beam writing apparatus11 Mar 2025US 12,249,483 B2NuFlare Technology, Inc.
- Charged particle beam writing device and charged particle beam writing method26 Dec 2023US 11,854,764 B2NuFlare Technology, Inc.
- Operating a particle beam apparatus with an object holder27 Jun 2023US 11,688,583 B2Carl Zeiss Microscopy GmbH
- Electron beam column for three-dimensional printing device, three-dimensional printing device, and three-dimensional printing method4 Oct 2022US 11,458,561 B2Advantest Corporation
- Charged particle beam substrate inspection using both vector and raster scanning11 Apr 2017US 9,620,332 B1Multibeam Corporation
- Charged particle beam writing method and charged particle beam writing apparatus6 Apr 2023US 2023/0107036 A1NuFlare Technology, Inc.
- Charged particle beam writing device and charged particle beam writing method22 Sep 2022US 2022/0301818 A1NuFlare Technology, Inc.
- Operating a particle beam apparatus with an object holder21 Jul 2022US 2022/0230843 A1Carl Zeiss Microscopy GmbH
- Electron beam column for three-dimensional printing device, three-dimensional printing device, and three-dimensional printing method7 Nov 2019US 2019/0337085 A1Advantest Corporation
- Method for acquiring settling time13 Aug 2015US 2015/0228453 A1NuFlare Technology, Inc.
Most cited
By later US patents
- Virtual addressing for E-beam lithography45US 4,498,010 AThe Perkin-Elmer Corporation · 1985
- Electron beam system33US 4,494,004 AInternational Business Machines Corporation · 1985
- Continuously writing electron beam stitched pattern exposure system30US 4,477,729 AInternational Business Machines Corporation · 1984
- Charged beam pattern data generating method and a charged beam pattern data generating apparatus18US 5,812,412 AMitsubishi Denki Kabushiki Kaisha · 1998
- Charged particle beam substrate inspection using both vector and raster scanning16US 9,466,463 B1Multibeam Corporation · 2016