US 2019/0337085 A1Published application

Electron beam column for three-dimensional printing device, three-dimensional printing device, and three-dimensional printing method

AssigneeAdvantest Corporation

InventorsShinichi HAMAGUCHI, Shinji SUGATANI, Masayuki TAKAHASHI, Masahiro TAKIZAWA

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Abstract

To provide a three-dimensional printing device that irradiates approximately the same ranges on the surface of a powder layer simultaneously with a plurality of electron beams having different beam shapes. An electron beam column 200 of the three-dimensional printing device 100 includes a plurality of electron sources 20 including electron sources having anisotropically-shaped beam generating units, and beam shape deforming elements 30 that deform the beam shapes of electron beams output from the electron sources 20 on a surface 63 of a powder layer 62. A deflector 50 included in the electron beam column 200 deflects an electron beam output from each of the plurality of electron sources 20 by a distance larger than the beam space between electron beams before passing through the deflector 50.

Claims13

Dependent claims

An electron beam column for a three-dimensional layering device comprising:

a first electron source that has an anisotropically-shaped electron emitting surface, and outputs a first electron beam accelerated to a predetermined acceleration voltage;
a second electron source that has an anisotropically-shaped electron emitting surface, and outputs a second electron beam accelerated to a predetermined acceleration voltage;
a first beam shape deforming element that deforms a cross-sectional shape of the first electron beam;
a second beam shape deforming element that deforms a cross-sectional shape of the second electron beam;
an electromagnetic lens that converges the first electron beam and the second electron beam;
and
a deflector that adjusts irradiation positions of the first electron beam and the second electron beam in a deflectable range larger than a space between the first electron beam and the second electron beam, wherein
the first beam deforming element and the second beam deforming element have multipole elements arranged at multiple stages along an advancing direction of the electron beam, and
each of the multipole elements is formed of an electrostatic quadrupole element, a direction along which a pair of pole elements of the electrostatic quadrupole element is arranged coincides with a longitudinal direction of the electron emitting surface, and a direction along which the other pair of pole elements is arranged coincides with a lateral direction of the electron emitting surface.

6 more elements

A three-dimensional printing device comprising:

an electron beam column having:
a first electron source that outputs a first electron beam accelerated to a predetermined acceleration voltage;
a second electron source that outputs a second electron beam accelerated to a predetermined acceleration voltage;
a first beam shape deforming element that deforms a cross-sectional shape of the first electron beam;
a second beam shape deforming element that deforms a cross-sectional shape of the second electron beam;
and
a deflector that adjusts irradiation positions of the first electron beam and the second electron beam in a deflectable range larger than a space between the first electron beam and the second electron beam;
a manufacturing container that holds a powder layer;
a powder supply device that supplies a new powder layer to a surface of the manufacturing container;
a control unit that, based on three-dimensional structure manufacturing data, performs simultaneous irradiation using the first electron beam and the second electron beam, and causes a predetermined range of the powder layer to be melted and solidified;
and
a deforming element control unit that outputs control signals to the first beam shape deforming element, and the second beam shape deforming element, wherein
the deforming element control unit has:
a preliminary irradiation data storage circuit that stores control output for generating an electron beam for preliminary irradiation having an elongated cross-sectional shape;
an outlining irradiation data storage circuit that stores control output for generating an electron beam for outlining irradiation having a narrowed cross-sectional shape,
a melting irradiation data calculating circuit that calculates control output necessary for generating a beam having a size requested by the control unit, and
a switching unit that, based on a control signal from the control unit, selectively outputs any one of output from the preliminary irradiation data storage circuit, output from the outlining irradiation data storage circuit, and output from the melting irradiation data calculating circuit.

14 more elements

Dependencies are inferred from the claim text.

Facts

Application: 16/344,359Filed 12 Jan 2017
Published: 7 Nov 2019
Term ends: Not estimatedThe source records don’t support an estimate.

Classification33 codes

B23K 15/0086
Welding: welding for purposes other than joining, e.g. build-up welding
B22F 3/105
Sintering only: by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
B22F 3/16
Both compacting and sintering: in successive or repeated steps
B22F 10/20
Additive manufacturing of workpieces or articles from metallic powder: direct sintering or melting