Operating a particle beam apparatus with an object holder

A computer program product comprising program code which can be loaded into a processor and which, when executed, controls a beam apparatus to perform the following steps:

• generating at least one marking on an object holder using a laser beam of a laser beam apparatus and/or a particle beam of a particle beam apparatus, wherein the particle beam includes charged particles and wherein at least one object is arranged on the object holder;
• moving the object holder using a translational movement of the object holder along at least one axis (x-axis, y-axis) and/or a rotation of the object holder about at least one axis of rotation;
• positioning the particle beam and/or the laser beam in relative fashion in relation to the object using the marking;
• and
• processing, imaging and/or analyzing the object using the particle beam and/or the laser beam.

A beam apparatus for processing, imaging and/or analyzing an object, comprising:

• at least one beam generator that generates a particle beam with charged particles and/or a laser beam;
• at least one object holder that arranges the object;
• at least one scanning device that scans the particle beam and/or the laser beam over the object;
• at least one detector that detects interaction particles and/or interaction radiation resulting from an interaction of the particle beam and/or the laser beam with the object;
• at least one display device that displays the image and/or the analysis of the object, and
• at least one control unit having a processor in which a computer program product is loaded, the computer program product performing the following steps:
• generating at least one marking on an object holder using a laser beam of a laser beam apparatus and/or a particle beam of a particle beam apparatus, wherein the particle beam includes charged particles and wherein at least one object is arranged on the object holder;
• moving the object holder using a translational movement of the object holder along at least one axis and/or a rotation of the object holder about at least one axis of rotation;
• positioning the particle beam and/or the laser beam in relative fashion in relation to the object using the marking;
• and
• processing, imaging and/or analyzing the object using the particle beam and/or the laser beam.

An object holder for arrangement in a particle beam apparatus, comprising:

• at least one holding device that holds an object;
• and,
• at least one marking that positions a particle beam of the particle beam apparatus, wherein
• the object holder feeds charged particles which transmit through the object.