H01J 2237/2857
Particle bombardment induced emission
H01J2237/2857 (Particle bombardment induced emission) appears on 21 US grants and 21 published applications in this corpus.
Search patents in H01J- Granted patents
- 21
- Published applications
- 21
- Assignees
- 8
- Inventors
- 34
- Latest grant
- 27 May 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2003 | 1 | 1 |
| 2004 | 0 | 1 |
| 2005 | 0 | 1 |
| 2006 | 1 | 1 |
| 2007 | 1 | 0 |
| 2008 | 1 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 1 | 0 |
| 2012 | 1 | 3 |
| 2013 | 1 | 0 |
| 2014 | 1 | 2 |
| 2015 | 1 | 2 |
| 2016 | 2 | 1 |
| 2017 | 1 | 1 |
| 2018 | 2 | 0 |
| 2019 | 0 | 1 |
| 2020 | 1 | 2 |
| 2021 | 2 | 3 |
| 2022 | 2 | 0 |
| 2023 | 1 | 1 |
| 2024 | 0 | 0 |
| 2025 | 1 | 0 |
By publication year.
Recent patents
- Device for observing permeation and diffusion path of observation target gas, observation target gas measuring method, point-defect location detecting device, point-defect location detecting method, and observation samples27 May 2025US 12,315,696 B2National Institute for Materials Science
- Particle beam system and method for the particle-optical examination of an object23 May 2023US 11,657,999 B2Carl Zeiss MultiSEM GmbH
- Method of imaging a 2D sample with a multi-beam particle microscope6 Dec 2022US 11,521,827 B2Carl Zeiss MultiSEM GmbH
- Light guide assembly for an electron microscope17 May 2022US 11,335,536 B2FEI Company
- Method of imaging a 3D sample with a multi-beam particle microscope20 Jul 2021US 11,069,508 B2Carl Zeiss MultiSEM GmbH
- Device for observing permeation and diffusion path of observation target gas, observation target gas measuring method, point-defect location detecting device, point-defect location detecting method, and observation samples27 Apr 2023US 2023/0127466 A1National Institute for Materials Science
- Method of imaging a 2d sample with a multi-beam particle microscope11 Nov 2021US 2021/0351001 A1Carl Zeiss MultiSEM GmbH
- Particle beam system and method for the particle-optical examination of an object7 Oct 2021US 2021/0313137 A1Carl Zeiss MultiSEM GmbH
- Light guide assembly for an electron microscope18 Mar 2021US 2021/0082659 A1FEI Company
- Method of imaging a 3d sample with a multi-beam particle microscope30 Jul 2020US 2020/0243300 A1Carl Zeiss MultiSEM GmbH
Most cited
By later US patents
- Charged particle beam apparatus and method for operating the same178US 7,045,781 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · 2006
- Charged particle beam apparatus and method for operating the same159US 7,274,018 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · 2007
- Particle beam system and method for the particle-optical examination of an object36US 10,535,494 B2Carl Zeiss Microscopy GmbH · 2020
- Method of detecting electrons, an electron-detector and an inspection system36US 9,336,982 B2Carl Zeiss Microscopy GmbH · 2016
- Inspection device27US 8,497,476 B2Ebara Corporation · 2013