Device for observing permeation and diffusion path of observation target gas, observation target gas measuring method, point-defect location detecting device, point-defect location detecting method, and observation samples

A method of measuring gas permeating a sample, the method comprising:

• supplying a gas to a pipe connected to a back side of a sample housed in an analysis chamber, so as to apply a stress to the sample due to differential pressure generated between the analysis chamber and the gas pipe;
• obtaining a SEM image by using secondary electrons generated from the sample upon which an electron beam is scanned;
• turning the gas, which diffuses within the sample from the back surface of the sample and is discharged to a surface of the sample, into ions by an electron stimulated desorption of the electron beam;
• and
• obtaining an ESD image of the ions in synchronization with the electron beam scanning, wherein
• in the obtaining of the ESD image, a position resolution of the SEM image and that of the ESD image are made to be 50 nm or lower for comparison to obtain structural information concerning a position of release of the ions.

A method of detecting the location of a point defect, the method comprising:

• preparing a sample;
• placing the sample in the diaphragm-type sample holder provided in an analysis chamber, the diaphragm-type sample holder comprising a diaphragm dividing the analysis chamber and a pipe connected to a back side of the sample;
• supplying a gas to the pipe, so as to apply a stress to the sample due to differential pressure generated between the analysis chamber and the gas pipe;
• obtaining the SEM image of the sample by using secondary electrons generated from the sample upon which an electron beam is scanned;
• turning the gas, which diffuses within the sample from the back surface of the sample and is discharged to a surface of the sample, into ions by an electron stimulated desorption of the electron beam;
• obtaining an ESD image of the ions in synchronization with the electron beam scanning;
• and
• identifying the location of the point defect of the sample by comparing the SEM image and the ESD image.