Method of detecting electrons, an electron-detector and an inspection system

An electron-detector comprising:

• a scintillator plate having a scintillator material;
• electron optics configured to direct a plurality of electron beams onto the scintillator plate so that the plurality of electron beams is incident onto the scintillator plate at a plurality of locations of incidence disposed at a distance from each other;
• a light detector comprising a plurality of light receiving areas disposed at a distance from each other;
• and
• light optics configured to generate, in a region where the light receiving areas of the light detector are disposed, a first light-optical image of at least a portion of the scintillator plate so that, by the imaging, each of the locations of incidence is associated with one of the light receiving areas;
• and
• wherein the electron optics comprise an electron beam deflector configured to displace the locations of incidence of the electron beams on the scintillator plate in a direction orthogonal to a normal of a surface of the scintillator plate.

An electron-detector comprising:

• a scintillator plate having a scintillator material;
• electron optics configured to direct a plurality of electron beams onto the scintillator plate so that the plurality of electron beams is incident onto the scintillator plate at a plurality of locations of incidence disposed at a distance from each other;
• a light detector comprising a plurality of light receiving areas disposed at a distance from each other;
• light optics configured to generate, in a region where the light receiving areas of the light detector are disposed, a first light-optical image of at least a portion of the scintillator plate so that, by the imaging, each of the locations of incidence is associated with one of the light receiving areas;
• and
• an actuator configured to displace the scintillator plate relative to the light optics in a direction orthogonal to a normal of a surface of the scintillator plate.