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US 11,335,536 B2Granted
Light guide assembly for an electron microscope
AssigneeFEI Company
InventorsMarek Uncovsky, Michal Geryk, Jan Lasko
Life of this patent
Estimating the term…
Abstract
An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.
Claims26
An electron microscope system, comprising:
- an electron pole piece;
- and
- a light guide assembly operatively coupled to the electron column pole piece and comprising one or more detectors, and a mirror that includes a pressure limiting aperture through which an electron beam from an electron source passes, wherein the mirror is configured to reflect light, to collect back scattered electrons and secondary electrons, and to convert the back scattered electrons to secondary electrons.
A light guide assembly, comprising:
- a mirror that includes a pressure limiting aperture through which an electron beam from an electron source passes, wherein the mirror is configured to reflect light, to collect back scattered electrons and secondary electrons, and to convert the back scattered electrons to secondary electrons.
An electron microscope system, comprising:
- an electron pole piece;
- and
- a light guide assembly operatively coupled to the electron column pole piece and comprising one or more detectors, and a mirror that includes a pressure limiting aperture through which an electron beam from an electron source passes, wherein the mirror is configured to reflect light from a light source comprising a laser or a light emitting diode (LED) to a sample and from the sample to a light detector, and the mirror is further configured to collect back scattered electrons and secondary electrons.
A light guide assembly, comprising:
- a mirror that includes a pressure limiting aperture through which an electron beam from an electron source passes, wherein the mirror is configured to reflect light from a light source comprising a laser or a light emitting diode (LED) to a sample and from the sample to a light detector, and the mirror is further configured to collect back scattered electrons and secondary electrons.
Dependencies are inferred from the claim text.