Particle beam system and method for the particle-optical examination of an object

A particle beam system, comprising:

• a particle source configured to produce a first beam of charged particles;
• a multiple beam producer configured to produce a plurality of partial beams from a first incident beam of charged particles, which partial beams are spaced apart spatially in a direction perpendicular to a propagation direction of the partial beams, the plurality of partial beams comprising at least a first partial beam and a second partial beam;
• an objective configured to focus incident partial beams in a first plane so that a first region, on which the first partial beam is incident in the first plane, is separated from a second region, on which the second partial beam is incident;
• and
• a detector system, comprising:
• a projective system;
• and
• a plurality of detection regions,
• wherein:
• the projective system is configured to project interaction products, which leave the first plane due to the incident partial beams, onto the plurality of detection regions;
• the projective system and the plurality of detection regions are matched to one another in such a way that interaction products emanating from the first region of the first plane are projected onto a first detection region of the detector system and interaction products emanating from the second region of the first plane are projected onto a second detection region at least partly different from the first detection region;
• the plurality of detection regions are configured so that a plurality of first detection fields are associated with the first detection region and a plurality of second detection fields are associated with the second detection region;
• for each first detection field, the first detection field is configured to detect the interaction products incident on the respective first detection field in a manner independent of interaction products incident on other detection fields;
• for each second detection field, the second detection field is configured to detect the interaction products incident on the respective second detection field in a manner independent of interaction products incident on other detection fields;
• the particle beam system further comprises a controller embodied to separately readout and process detector signals from the plurality of first and second detection fields of an associated detection region;
• the controller is configured to analyze detector signals from the plurality of detection fields of an associated detection region;
• and
• the controller is further configured to at least one of
• determine sample charge effects based on the results of the analyzing of the detector signals,
• to determine, based on the analyzing of the detector signals, a displacement of an intensity distribution of the interaction products from intended positions,
• to determine, based on the analyzing of the detector signals, a deviation of an intensity distribution of the interaction products from an intended distribution of the interaction products, and
• to determine, based on the analyzing of the detector signals, an readjustment signal for the charged particle beam system.