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US 2021/0351001 A1Published application
Method of imaging a 2d sample with a multi-beam particle microscope
AssigneeCarl Zeiss MultiSEM GmbH
InventorsDirk Zeidler, Anna Lena Eberle
Life of this patent
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Abstract
A fast method of imaging a 2D sample with a multi-beam particle microscope includes the following steps: providing a layer of the 2D sample; determining a feature size of features included in the layer; determining a pixel size based on the determined feature size in the layer; determining a beam pitch size between individual beams in the layer based on the determined pixel size; and imaging the layer of the 2D sample with a setting of the multi-beam particle microscope based on the determined pixel size and based on the determined beam pitch size.
Claims21
-23. (canceled)
A method, comprising:
- determining a pixel size based on a feature size in a 2D sample;
- determining a beam pitch size between individual beams of a multi-beam particle microscope based on the determined pixel size;
- and
- using the multi-beam particle microscope to image the 2D sample with a setting of the multi-beam particle microscope based on the determined pixel size and based on the determined beam pitch size.
1 more element
A method, comprising:
- classifying a 2D sample into a plurality of regions based on feature sizes in the regions;
- determining, per region, a minimum feature size in the region;
- determining, per region, a pixel size based on the determined minimum feature size in the region;
- determining, per region, a beam pitch size between individual beams of a multi-beam particle microscope based on the determined beam pitch size in the region;
- and
- imaging, per region, the 2D sample with a setting of the multi-beam particle microscope based on the determined pixel size in the region and based on the determined beam pitch size in the region.
3 more elements
Dependencies are inferred from the claim text.