H01J 2237/2808
Cathodoluminescence
H01J2237/2808 (Cathodoluminescence) appears on 55 US grants and 59 published applications in this corpus.
Search patents in H01J- Granted patents
- 55
- Published applications
- 59
- Assignees
- 38
- Inventors
- 147
- Latest grant
- 16 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 1 |
| 2004 | 0 | 1 |
| 2005 | 1 | 0 |
| 2006 | 1 | 2 |
| 2007 | 0 | 3 |
| 2008 | 0 | 4 |
| 2009 | 1 | 4 |
| 2010 | 2 | 1 |
| 2011 | 4 | 2 |
| 2012 | 2 | 2 |
| 2013 | 2 | 8 |
| 2014 | 4 | 3 |
| 2015 | 2 | 3 |
| 2016 | 3 | 0 |
| 2017 | 2 | 3 |
| 2018 | 1 | 2 |
| 2019 | 4 | 2 |
| 2020 | 0 | 2 |
| 2021 | 5 | 7 |
| 2022 | 4 | 6 |
| 2023 | 5 | 1 |
| 2024 | 1 | 1 |
| 2025 | 3 | 1 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Luminescence method for the in-line detection of atomic scale defects during fabrication of 4H—SiC diodes16 Jun 2026US 12,660,570 B2The University of Hong Kong
- Cathodoluminescence electron microscope9 Dec 2025US 12,494,340 B2Attolight AG
- Apparatus and method for detecting one or more scanning charged particle beams12 Aug 2025US 12,387,905 B2Delmic IP B.V.
- Method and apparatus for inspecting a sample by means of multiple charged particle beamlets20 May 2025US 12,306,121 B2Delmic IP B.V.
- Cost effective probing in high volume manufacture of micro LEDs18 Jun 2024US 12,014,896 B2Attolight AG
- Light collection/injection mirror alignment25 Dec 2025US 2025/0391631 A1
- Luminescence method for the in-line detection of atomic scale defects during fabrication of 4h-sic diodes18 Apr 2024US 2024/0128129 A1The University of Hong Kong
- Method and apparatus for inspecting a sample by means of multiple charged particle beamlets19 Jan 2023US 2023/0020967 A1Delmic IP B.V.
- Apparatus and method for detecting one or more scanning charged particle beams28 Jul 2022US 2022/0238297 A1Delmic IP B.V.
- Cost effective probing in high volume manufacture of micro leds21 Jul 2022US 2022/0230841 A1Attolight AG
Most cited
By later US patents
- Integrated emission microscope for panchromatic imaging, continuous wavelength spectroscopy and selective area spectroscopic mapping15US 5,724,131 ANational University of Singapore · 1998
- Sample measuring device14US 7,589,322 B2Horiba, Ltd. · 2009
- Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment14US 8,334,510 B2B-Nano Ltd. · 2012
- Electron microscopes13US 4,117,323 AIowa State University Research Foundation, Inc. · 1978
- Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector13US 4,900,932 ACarl-Zeiss-Stiftung · 1990