Integrated emission microscope for panchromatic imaging, continuous wavelength spectroscopy and selective area spectroscopic mapping

An integrated emission microscope system for collecting and analyzing light emitted from an emission point of interest on a device under test, comprising:

• (a) first stage optical/emission microscope system for positioning identifying an emission point of interest on a device under test;
• (b) a concave ellipsoidal mirror with an ellipticity greater than 0.8, the mirror having first and second focal points;
• (c) means for positioning the emission point of interest at the first focal point of the mirror;
• and
• (d) emission collection means located at the second focal point of the mirror, said collection means having a collection face centered upon and substantially perpendicular to the axis connecting the first and second focal points, whereby emissions from the emission point of interest are focused to the second focal point and collected by said collection means.