Cathodoluminescence electron microscope

A scanning electron microscope comprising:

• a sample holder;
• an electron column positioned to direct an electron beam downwards onto a sample positioned on the sample holder;
• and,
• a light imager situated to receive a light beam from the electron column;
• wherein the electron column comprises:
• a vacuum enclosure;
• an electron source;
• an electromagnetic objective lens positioned within the vacuum enclosure, the electromagnetic objective lens including a housing having an entry aperture at top surface thereof and an exit aperture at bottom thereof;
• an electromagnetic coil radially positioned within the housing;
• a light objective positioned within the housing and comprising a concave mirror having a first axial aperture and a convex mirror having a second axial aperture;
• an electron beam deflector positioned within the housing and comprising a first set of deflectors and a second set of deflectors positioned below the first set of deflectors, wherein the second set of deflectors is positioned below the first axial aperture and the first set of deflectors is positioned above the second set of deflectors.