H01J 2237/1518
For x-y scanning
Official title: for X-Y scanning
H01J2237/1518 (For x-y scanning) appears on 24 US grants and 25 published applications in this corpus.
Search patents in H01J- Granted patents
- 24
- Published applications
- 25
- Assignees
- 21
- Inventors
- 64
- Latest grant
- 26 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 1 |
| 2007 | 0 | 1 |
| 2008 | 1 | 1 |
| 2009 | 1 | 2 |
| 2010 | 1 | 1 |
| 2011 | 2 | 2 |
| 2012 | 2 | 0 |
| 2013 | 0 | 2 |
| 2014 | 2 | 2 |
| 2015 | 2 | 3 |
| 2016 | 2 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 0 |
| 2019 | 0 | 1 |
| 2020 | 1 | 2 |
| 2021 | 1 | 2 |
| 2022 | 3 | 2 |
| 2023 | 1 | 1 |
| 2024 | 2 | 2 |
| 2025 | 1 | 0 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Distortion optimized multi-beam scanning system26 May 2026US 12,640,334 B2Carl Zeiss MultiSEM GmbH
- Compact 2D scanner magnet with trapezoidal coils11 Nov 2025US 12,469,667 B2Brookhaven Science Associates, LLC
- Multi-beam electronics scan18 Jun 2024US 12,014,895 B2KLA Corporation
- Semiconductor wafer12 Mar 2024US 11,929,229 B2Mi2-Factory GmbH
- Method and device for implanting ions in wafers18 Jul 2023US 11,705,300 B2Mi2-Factory GmbH
- Compact 2d scanner magnet with trapezoidal coils28 Nov 2024US 2024/0395495 A1Brookhaven Science Associates, LLC
- Distortion optimized multi-beam scanning system21 Mar 2024US 2024/0096587 A1Carl Zeiss MultiSEM GmbH
- Semiconductor wafer7 Sep 2023US 2023/0282439 A1Mi2-Factory GmbH
- Method of influencing a charged particle beam, multipole device, and charged particle beam apparatus1 Sep 2022US 2022/0277921 A1ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Multi-beam electronics scan23 Jun 2022US 2022/0199352 A1KLA Corporation
Most cited
By later US patents
- High throughput/high resolution particle beam system43US 4,445,039 AThe Perkin-Elmer Corporation · 1984
- Pattern modification schemes for improved FIB patterning6US 8,314,409 B2FEI Company · 2012
- Charged particle beam writing apparatus and method thereof5US 8,080,809 B2NuFlare Technology, Inc. · 2011
- Deflector array, exposure apparatus, and device manufacturing method4US 7,795,597 B2Canon Kabushiki Kaisha · 2010
- Methods and systems for testing digital-to-analog converter/amplifier circuits4US 7,898,447 B2NuFlare Technology, Inc. · 2011