Multi-beam electronics scan
AssigneeKLA Corporation
InventorsTomas Plettner, Doug Larson, Mark Cawein, Jason W. Huang
Life of this patent
Estimating the term…
Abstract
A multi-beam electronics scanning system using swathing. The system includes an electron emitter source configured to emit an illumination beam. The illumination beam is split into multiple electron beams by a beam splitter lens array. The system also includes an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes. Last, a swathing stage is used to move a sample with a constant velocity in a second direction that is parallel to the first direction.
Claims20
A system comprising:
- an electron emitter source configured to emit an illumination beam;
- a beam splitter lens array configured to split the illumination beam into multiple electron beams;
- an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes;
- and
- a swathing stage configured to move a sample during writing of scan lines by the electronic beams with a constant velocity in a second direction that is parallel to the first direction, wherein the scan lines are written parallel to the second direction in a rectangular pattern by each of the electron beams, wherein a length of the rectangular pattern is measured along the first direction and the length is longer than a width of the rectangular pattern.
A method comprising:
- emitting an illumination beam from an electron emitter source;
- splitting the illumination beam into multiple electron beams using a beam splitter lens array;
- deflecting, via an electronic deflection system, each of the electron beams in a plurality of directions, including a first direction, along two different axes;
- and
- moving a sample during writing of scan lines by the electronic beams with a constant velocity in a second direction that is parallel to the first direction, wherein the scan lines are written parallel to the second direction in a rectangular pattern by each of the electron beams, wherein a length of the rectangular pattern is measured along the first direction and the length is longer than a width of the rectangular pattern.
A non-transitory computer readable medium storing instructions to cause a computer processor to execute a method, the method comprising:
- emitting an illumination beam from an electron emitter source;
- splitting the illumination beam into multiple electron beams using a beam splitter lens array;
- deflecting, via an electronic deflection system, each of the electron beams in a plurality of directions, including a first direction, along two different axes;
- and
- moving a sample during writing of scan lines by the electronic beams with a constant velocity in a second direction that is parallel to the first direction, wherein the scan lines are written parallel to the second direction in a rectangular pattern by each of the electron beams, wherein a length of the rectangular pattern is measured along the first direction and the length is longer than a width of the rectangular pattern.
Dependencies are inferred from the claim text.