Deflector array, exposure apparatus, and device manufacturing method
AssigneesCanon Kabushiki Kaisha, Hitachi High-Technologies Corporation
InventorsKenichi Nagae, Masatoshi Kanamaru
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Abstract
A deflector array in which a plurality of deflectors, which deflect charged particle beams, are arrayed on a substrate. The plurality of deflectors include respective openings different from each other formed on the substrate. Each of the plurality of deflectors includes a pair of electrodes opposing each other through a corresponding opening, and the plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors which are located nearest to each other.
Claims9
A deflector array comprising:
- a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate,
- wherein each of said plurality of deflectors includes a single opening formed in the substrate, and each of said plurality of deflectors including a pair of electrodes that oppose each other through the opening and being configured to deflect a single charged particle beam, and
- wherein said plurality of deflectors are arrayed such that a length of said pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of said plurality of deflectors that are located nearest to each other, said plurality of deflectors being arrayed to form a rectangular lattice, the longitudinal direction being tilted with respect to a direction of a side of a rectangle in the rectangular lattice.
Dependencies are inferred from the claim text.