H01J 2237/1505
Rotating beam around optical axis
H01J2237/1505 (Rotating beam around optical axis) appears on 27 US grants and 26 published applications in this corpus.
Search patents in H01J- Granted patents
- 27
- Published applications
- 26
- Assignees
- 27
- Inventors
- 79
- Latest grant
- 17 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 1 |
| 2011 | 0 | 0 |
| 2012 | 1 | 0 |
| 2013 | 0 | 1 |
| 2014 | 0 | 1 |
| 2015 | 0 | 1 |
| 2016 | 2 | 1 |
| 2017 | 1 | 1 |
| 2018 | 2 | 4 |
| 2019 | 2 | 2 |
| 2020 | 5 | 2 |
| 2021 | 1 | 2 |
| 2022 | 1 | 4 |
| 2023 | 3 | 3 |
| 2024 | 2 | 1 |
| 2025 | 2 | 1 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system11 Mar 2025US 12,249,478 B2Carl Zeiss MultiSEM GmbH
- Multi-beam charged particle source with alignment means11 Feb 2025US 12,224,152 B2Applied Materials Israel Ltd.
- Transmission electron microscope and inspection method using transmission electron microscope17 Dec 2024US 12,170,184 B2Hitachi High-Tech Corporation
- System and method for scanning a sample using multi-beam inspection apparatus10 Dec 2024US 12,165,837 B2ASML Netherlands B. V.
- Charged particle system, aperture array, charged particle tool and method of operating a charged particle system18 Jun 2026US 2026/0171357 A1ASML Netherlands B. V.
- Image generation with improved scanning lines for smart charge distribution25 Sep 2025US 2025/0299915 A1
- Multi-beam charged particle source with alighment means21 Mar 2024US 2024/0096585 A1Applied Materials Israel Ltd.
- System and method for scanning a sample using multi-beam inspection apparatus31 Aug 2023US 2023/0274906 A1ASML Netherlands B. V.
- Method for producing a sample on an object, computer program product, and material processing device for carrying out the method17 Aug 2023US 2023/0260744 A1Carl Zeiss Microscopy GmbH
Most cited
By later US patents
- Variable shaped spot electron beam pattern generator19US 4,825,033 AU. S. Philips Corporation · 1989
- Techniques, system and apparatus for selective deposition of a layer using angled ions9US 10,879,055 B2Varian Semiconductor Equipment Associates, Inc. · 2020
- Apparatus for electron beam lithography8US 4,577,111 AHitachi, Ltd. · 1986
- Apparatus for controlling a charged particle beam and a lithographic process in which the apparatus is used8US 5,663,568 ALucent Technologies Inc. · 1997
- Methods, apparatuses, systems and software for treatment of a specimen by ion-milling5US 9,911,573 B2IB Labs, Inc. · 2018