System and method for scanning a sample using multi-beam inspection apparatus

A non-transitory computer readable medium storing a set of instructions that is executable by one or more processors of a multi-beam tool to cause the multi-beam tool to perform a method to form an image of a sample, the method comprising:

• generating a primary beam of charged particles;
• splitting the primary beam into an array of beams;
• rotating the array of beams, relative to the sample to be scanned, by a rotation angle determined based on a number of beams in a row of the array of beams, wherein the array of beams scan a set of scan lines along a first direction and the set of scan lines cover a surface area of the sample;
• and
• moving the sample along a second direction.

A multi-beam system comprising:

• a charged-particle source configured to generate a primary beam of charged particles;
• a beam configuration system configured to:
• split the primary beam of charged particles into an array of beams;
• and
• deflect the array of beams to scan a set of scan lines along a first direction to cover a surface area of a sample;
• and
• a sample stage for holding the sample, the sample stage configured to move the sample with a constant velocity in a second direction that is parallel to the first direction.