H01J 2237/121
Characterised by shape
Official title: characterised by shape
H01J2237/121 (Characterised by shape) appears on 75 US grants and 86 published applications in this corpus.
Search patents in H01J- Granted patents
- 75
- Published applications
- 86
- Assignees
- 41
- Inventors
- 154
- Latest grant
- 19 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 1 |
| 2004 | 0 | 3 |
| 2005 | 3 | 3 |
| 2006 | 2 | 3 |
| 2007 | 3 | 1 |
| 2008 | 1 | 4 |
| 2009 | 3 | 4 |
| 2010 | 1 | 1 |
| 2011 | 3 | 6 |
| 2012 | 3 | 4 |
| 2013 | 4 | 8 |
| 2014 | 10 | 2 |
| 2015 | 3 | 5 |
| 2016 | 4 | 5 |
| 2017 | 0 | 4 |
| 2018 | 5 | 2 |
| 2019 | 0 | 0 |
| 2020 | 3 | 8 |
| 2021 | 5 | 5 |
| 2022 | 4 | 5 |
| 2023 | 3 | 3 |
| 2024 | 4 | 5 |
| 2025 | 2 | 3 |
| 2026 | 4 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Electron beam apparatus, foil or grid lens, and method of operating an electron beam apparatus19 May 2026US 12,633,489 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Beam manipulator in charged particle-beam exposure apparatus5 May 2026US 12,620,547 B2ASML Netherlands B. V.
- Axially progressive lens for transporting charged particles10 Feb 2026US 12,548,750 B2Agilent Technologies, Inc.
- Charged particle beam apparatus13 Jan 2026US 12,525,430 B2Hitachi High-Tech Corporation
- Apparatuses and methods for merging ion beams21 Oct 2025US 12,451,342 B2Purdue Research Foundation
- Apparatuses and methods for merging ion beams22 Jan 2026US 2026/0024737 A1Purdue Reserch Foundation
- Method for designing a multi-beam particle beam system having monolithic path trajectory correction plates, computer program product and multi-beam particle beam system13 Nov 2025US 2025/0349497 A1
- Lens designs17 Apr 2025US 2025/0125120 A1ASML Netherlands B. V.
- Electron beam apparatus, foil or grid lens, and method of operating an electron beam apparatus13 Mar 2025US 2025/0087442 A1ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Beam manipulator in charged particle-beam apparatus24 Oct 2024US 2024/0355575 A1ASML Netherlands B. V.
Most cited
By later US patents
- Multiple beam charged particle optical system42US 8,134,135 B2Mapper Lithography IP B.V. · 2012
- Reduced path ion beam implanter37US 5,091,655 AEaton Corporation · 1992
- Objective lens arrangement usable in particle-optical systems33US 10,622,184 B2Applied Materials Israel Ltd. · 2020
- Electron optic column and scanning electron microscope24US 5,399,860 AKabushiki Kaisha Toshiba · 1995
- Projection lens arrangement21US 8,089,056 B2Mapper Lithography IP B.V. · 2012