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US 5,399,860 AGranted
Electron optic column and scanning electron microscope
AssigneeKabushiki Kaisha Toshiba
InventorsMotosuke Miyoshi, Katsuya Okumura
Life of this patent
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Abstract
An electron microscope is provided which is reduced in total weight and shape. An electron gun cathode and an electron gun lens are enclosed in an electron gun chamber. An electron beam emitted from the electron gun chamber is converged by an objective lens to irradiate a wafer. Each of the electron gun lens and the objective lens is formed as an electrostatic field lens.
Claims10
A scanning electron microscope comprising:
- a sample chamber;
- a sample stage provided within the sample chamber, for holding a wafer;
- an electron optic column provided opposite to the sample stage within the sample chamber, for irradiating the wafer with an electron beam;
- and
- an X-Y movement mechanism provided within the sample chamber, for moving the electron optic column on a plane parallel to the wafer.
2 more elements
Dependencies are inferred from the claim text.