G21K 2201/065
Provided with cooling means
Official title: provided with cooling means
G21K2201/065 (Provided with cooling means) appears on 58 US grants and 60 published applications in this corpus.
Search patents in G21K- Granted patents
- 58
- Published applications
- 60
- Assignees
- 30
- Inventors
- 149
- Latest grant
- 28 May 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 1 |
| 2004 | 2 | 2 |
| 2005 | 1 | 4 |
| 2006 | 1 | 4 |
| 2007 | 3 | 6 |
| 2008 | 8 | 2 |
| 2009 | 5 | 2 |
| 2010 | 0 | 3 |
| 2011 | 2 | 6 |
| 2012 | 4 | 3 |
| 2013 | 2 | 5 |
| 2014 | 1 | 0 |
| 2015 | 4 | 1 |
| 2016 | 1 | 4 |
| 2017 | 4 | 1 |
| 2018 | 0 | 2 |
| 2019 | 4 | 4 |
| 2020 | 4 | 6 |
| 2021 | 5 | 2 |
| 2022 | 1 | 0 |
| 2023 | 1 | 1 |
| 2024 | 1 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip28 May 2024US 11,996,210 B2Uchicago Argonne, LLC
- Apparatus and method for irradiation25 Apr 2023US 11,633,510 B2AquiSense Technologies LLC
- Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element28 Jun 2022US 11,372,334 B2Carl Zeiss SMT GmbH
- Radioisotope production9 Nov 2021US 11,170,907 B2ASML Netherlands B. V.
- Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device12 Oct 2021US 11,145,429 B2Gigaphoton Inc.
- Solid target irradiator system for radioisotopes production18 Jul 2024US 2024/0242852 A1Best Theratronics, Ltd.
- Temperature-tuned ultrafast x-ray shutter using optics-on-a-chip26 Oct 2023US 2023/0343479 A1Uchicago Argonne, LLC
- Radioisotope production2 Dec 2021US 2021/0375498 A1ASML Netherlands B. V.
- Apparatus and method for irradiation3 Jun 2021US 2021/0162083 A1AquiSense Technologies LLC
- Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device1 Oct 2020US 2020/0312479 A1Gigaphoton Inc.
Most cited
By later US patents
- Ultraviolet reflector with coolant gas holes and method413US 8,338,809 B2APPLIED Materials.Inc. · 2012
- EUV light source80US 7,164,144 B2Cymer, Inc. · 2007
- Monolithic silicon EUV collector54US 6,822,251 B1University of Central Florida Research Foundation, Inc. · 2004
- Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm20US 7,015,489 B2Carl Zeiss SMT GmbH · 2006
- Collector for an illumination system with a wavelength of less than or equal to 193 nm16US 6,964,485 B2Carl Zeiss SMT GmbH · 2005