Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
AssigneeCarl Zeiss SMT GmbH
InventorsMarkus Bauer, Ulrich Bingel, Willi Anderl
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Abstract
The disclosure provides a method that includes filling a cavity in a substrate with a second material, wherein the substrate includes a first material. The method also includes using galvanic and/or chemical deposition of a third material to apply an overcoating to a first surface of the substrate in a region of the cavity. The method further includes removing the second material from the cavity. In addition, the method includes, before or after removing the second material from the cavity, applying a reflective layer to the overcoating. The disclosure also provides related optical articles and systems.
Claims20
An optical element, comprising:
- a substrate;
- an overcoating comprising a galvanically or chemically deposited layer on a first surface of the substrate;
- a cavity configured to receive a fluid;
- and
- a reflective layer comprising an optically effective surface,
- wherein:
- the cavity is near the first surface of the substrate;
- the overcoating extends over the cavity;
- the cavity is free of material of the overcoating;
- and
- the reflective layer is on a surface of the overcoating that faces away from the substrate.
Dependencies are inferred from the claim text.