Radioisotope production

A method comprising:

• generating an electron beam using an electron injector and an electron accelerator;
• supporting a target on a target support structure;
• scanning the electron beam over a surface of the target using first and second electron beam distribution apparatuses;
• and
• producing radioisotope material based on irradiating the target using the electron beam.

A lithographic system comprising:

• a free electron laser configured to generate an electron beam and an illumination beam, the free electron laser comprising an electron injector and an electron accelerator;
• a lithographic apparatus configured to a project pattern onto a substrate using the illumination beam;
• and
• a radioisotope production apparatus configured to produce radioisotope material based on irradiating the target using the electron beam, the radioisotope production apparatus comprising:
• a target support structure configured to support a target;
• and
• a first and a second electron beam distribution apparatus, together configured to scan the electron beam over a surface of the target.