Monolithic silicon EUV collector

A collector optic assembly for collecting radiation, said assembly comprising:

• a heat exchanger fabricated from a plurality of sections fused together by a glass frit bonding process, said heat exchanger including a plurality of heat exchanger cooling channels;
• an elliptical meniscus machined from a single piece of silicon and being fused to the heat exchanger by a glass frit bonding process, said meniscus including a front reflective layer;
• an inlet manifold machined from a single piece of silicon and being fused to the heat exchanger by a glass frit bonding process, said inlet manifold including at least one inlet channel in fluid communication with the heat exchanger cooling channels;
• and
• an outlet manifold machined from a single piece of silicon and being mounted to the heat exchanger, said outlet manifold including at least one outlet channel in fluid communication with the heat exchanger cooling channels.