G03F 7/70516
Calibration of components of the microlithographic apparatus
Official title: {Calibration of components of the microlithographic apparatus, e.g. light sources, addressable masks or detectors}
G03F7/70516 (Calibration of components of the microlithographic apparatus) appears on 420 US grants and 514 published applications in this corpus.
Search patents in G03F- Granted patents
- 420
- Published applications
- 514
- Assignees
- 102
- Inventors
- 1,034
- Latest grant
- 22 Sep 2026
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| Year | Granted patents | Published applications |
|---|---|---|
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| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 5 | 1 |
| 2003 | 3 | 7 |
| 2004 | 5 | 9 |
| 2005 | 13 | 18 |
| 2006 | 9 | 22 |
| 2007 | 17 | 23 |
| 2008 | 16 | 20 |
| 2009 | 14 | 26 |
| 2010 | 15 | 20 |
| 2011 | 13 | 30 |
| 2012 | 20 | 15 |
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| 2016 | 25 | 17 |
| 2017 | 16 | 17 |
| 2018 | 27 | 27 |
| 2019 | 28 | 34 |
| 2020 | 30 | 29 |
| 2021 | 24 | 12 |
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| 2023 | 15 | 17 |
| 2024 | 15 | 26 |
| 2025 | 11 | 31 |
| 2026 | 21 | 32 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Lithographic apparatus and method for calibrating the same112US 7,256,871 B2ASML Netherlands B. V. · 2007
- Lithographic apparatus and method for calibrating the same106US 7,292,312 B2ASML Netherlands B. V. · 2007
- Apparatus and method for model based process control95US 5,402,367 ATexas Instruments Incorporated · 1995
- Metrology hardware specification using a hardware simulator85US 6,721,691 B2Timbre Technologies, Inc. · 2004
- Lithographic apparatus and device manufacturing method78US 7,619,207 B2ASML Netherlands B. V. · 2009