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AssigneeASML Netherlands B.V.
InventorsJohannes Bernardus Charles ENGELEN, Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN, Thomas POIESZ
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An object holder configured to support an object, the object holder including a support surface having a plurality of support elements, wherein the plurality of support elements include a reversibly changeable crystalline/amorphous phase material configured to provide a selectively changeable height of individual support elements. Also provided is an object table including such an object holder, an apparatus for controlling the flatness of a surface including an object holder, a lithographic apparatus or tool including such an object holder, a method of controlling the shape of a surface, a method of manufacturing an object holder, and the use of such apparatuses or method in a lithographic apparatus or process.
An object holder configured to support an object, the object holder comprising a support surface having a plurality of support elements, wherein the plurality of support elements comprise a reversibly changeable crystalline/amorphous phase or a piezo material, configured to provide a selectively changeable height of individual support elements.
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A method of controlling the shape of a surface of an object holder, the method comprising:
A method of manufacturing an object holder, the method comprising:
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Dependencies are inferred from the claim text.