G03F 7/70025
By lasers
Official title: {by lasers}
G03F7/70025 (By lasers) appears on 536 US grants and 639 published applications in this corpus.
Search patents in G03F- Granted patents
- 536
- Published applications
- 639
- Assignees
- 122
- Inventors
- 1,007
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 1 | 0 |
| 1992 | 3 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 3 | 0 |
| 1999 | 13 | 0 |
| 2000 | 14 | 0 |
| 2001 | 22 | 10 |
| 2002 | 27 | 58 |
| 2003 | 36 | 19 |
| 2004 | 34 | 23 |
| 2005 | 16 | 16 |
| 2006 | 18 | 8 |
| 2007 | 17 | 11 |
| 2008 | 5 | 12 |
| 2009 | 4 | 7 |
| 2010 | 11 | 7 |
| 2011 | 6 | 6 |
| 2012 | 7 | 9 |
| 2013 | 7 | 9 |
| 2014 | 10 | 7 |
| 2015 | 7 | 9 |
| 2016 | 8 | 13 |
| 2017 | 12 | 17 |
| 2018 | 16 | 32 |
| 2019 | 29 | 21 |
| 2020 | 14 | 29 |
| 2021 | 25 | 44 |
| 2022 | 36 | 43 |
| 2023 | 26 | 51 |
| 2024 | 27 | 48 |
| 2025 | 45 | 72 |
| 2026 | 33 | 58 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Mitigating long-term energy decay of laser devices11 Aug 2026US 12,704,792 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Laser apparatus and electronic device manufacturing method28 Jul 2026US 12,695,264 B2Gigaphoton Inc.
- Irradiating module, and apparatus for treating substrate with the same21 Jul 2026US 12,687,784 B2Semes Co., Ltd.
- Multi head scanning lithographic laser writer and a method for operating7 Jul 2026US 12,675,049 B2Mycronic AB
- Apparatus and method for laser interference structuring of substrates with periodic dot structures for anti-reflection properties7 Jul 2026US 12,675,050 B2Fusion Bionic GmbH
- Lithographic system8 Oct 2026US 2026/0310101 A1ASML Netherlands B. V.
- Radiation source assembly for generating broadband radiation8 Oct 2026US 2026/0312354 A1ASML Netherlands B. V.
- Lithography system with non-invasive monitoring and methods24 Sep 2026US 2026/0288012 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Pattern generator and method for driving pattern generator24 Sep 2026US 2026/0288013 A1Mycronic AB
- Laser apparatus, laser apparatus wavelength control method, and electronic device manufacturing method17 Sep 2026US 2026/0277108 A1Gigaphoton Inc.
Most cited
By later US patents
- Ultraviolet laser apparatus and exposure apparatus using same250US 7,023,610 B2Nikon Corporation · 2006
- Reliable modular production quality narrow-band high REP rate excimer laser171US 6,128,323 ACymer, Inc. · 2000
- Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser160US 6,018,537 ACymer, Inc. · 2000
- Wavelength system for an excimer laser146US 5,978,394 ACymer, Inc. · 1999
- Pulse energy control for excimer laser146US 6,005,879 ACymer, Inc. · 1999