Pattern generator and method for driving pattern generator
AssigneeMycronic AB
InventorsMartin GLIMTOFT, Andrzej KARAWAJCZYK, Jonas WALTHER
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AssigneeMycronic AB
InventorsMartin GLIMTOFT, Andrzej KARAWAJCZYK, Jonas WALTHER
Estimating the term…
A pattern generator (1) comprises a pulsed laser light source, a spatial light modulator, a control module, an optical end system (50) and a stage positioning device. The optical end system is arranged for positioning a laser illumination pattern (13) from the spatial light modulator on a writing plane (43). The optical end system further comprises a strip switch (70), configured to optically move a position of the laser illumination pattern on the writing plane in a sweep direction (61), perpendicular to a scan direction (62) of the stage positioning device. The control module is further arranged for generating laser illumination patterns at at least two predetermined positions in the sweep direction. A distance between the positions in the sweep direction is less or equal to a width in the sweep direction of the laser illumination pattern on the writing plane.
A pattern generator, comprising:
A method for operating a pattern generator, comprising the steps of:
Dependencies are inferred from the claim text.