Irradiating module, and apparatus for treating substrate with the same

An irradiating module for irradiating a light to a substrate comprising:

• a housing having an installation space;
• a laser unit configured to include a laser irradiation unit positioned in the installation space which irradiates a laser light, and an irradiation end having an end positioned to protrude from the housing and which irradiates the laser light irradiated from the laser irradiation unit to the substrate;
• and
• a cover having an inner space and positioned so an end of the irradiation end protruding from the housing is positioned in the inner space,
• wherein the cover is connected to a bottom surface of the housing,
• wherein the irradiation end is disposed in a space defined by the bottom surface of the housing and the cover, and
• wherein an opening is formed at a bottom end of the cover to overlap the laser light irradiated from the irradiation end when seen from above.

A substrate treating apparatus for treating a mask having a plurality of cells comprising:

• a support unit configured to support and rotate the mask on which a first pattern is formed within the plurality of cells and a second pattern is formed outside a region at which the plurality of cells are formed;
• a liquid supply unit configured to supply a liquid to the mask supported at the support unit;
• a housing having an installation space;
• a laser unit configured to include a laser irradiation unit positioned in the installation space which irradiates a laser light, and an irradiation end having an end positioned to protrude from the housing and which irradiates the laser light irradiated from the laser irradiation unit to the second pattern among the first pattern and the second pattern;
• and
• a cover having an inner space and positioned so an end of the irradiation end protruding from the housing is positioned in the inner space,
• wherein the cover is connected to a bottom surface of the housing,
• wherein the irradiation end is disposed in a space defined by the bottom surface of the housing and the cover, and
• wherein an opening is formed at a bottom end of the cover to overlap a laser light irradiated from the irradiation end when seen from the above.