Apparatus and method for laser interference structuring of substrates with periodic dot structures for anti-reflection properties
AssigneeFusion Bionic GmbH
InventorsTim Kunze, Sabri Alamri
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Abstract
The present invention relates to the field of patterning substrates with periodic dot structures in the micro- or sub-micrometer range, in particular to an apparatus and a method for structuring surfaces and the interior of a transparent substrate by means of laser interference structuring. The pattern produced in this way with periodic dot structures in the micro- or sub-micrometer range is characterized by a pronounced anti-reflective property. In addition, the present invention relates to a patterned substrate with anti-reflective properties comprising a periodic dot structure.
Claims21
A patterned substrate with anti-reflective properties, comprising a periodic dot structure in a micro- or sub-micrometer range;
- wherein the periodic dot structure is formed of inverse cones;
- wherein the inverse cones are arranged periodically with a distance from one another in a range of 50 nm to 50 μm;
- wherein a quasi-periodic wave structure is superimposed on the periodic dot structure;
- wherein the quasi-periodic wave structure has a sequence of wave crests and wave troughs with a periodicity in a range of 100 nm to 1000 nm;
- and
- wherein the quasi-periodic wave structure is generated by utilizing laser-induced periodic surface structures (LIPSS).
Dependencies are inferred from the claim text.