G01Q 40/00
Calibration
Official title: Calibration, e.g. of probes
G01Q40/00 (Calibration) appears on 183 US grants and 164 published applications in this corpus.
Search patents in G01Q- Granted patents
- 183
- Published applications
- 164
- Assignees
- 122
- Inventors
- 381
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 1 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 2 | 0 |
| 1996 | 4 | 0 |
| 1997 | 8 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 3 | 2 |
| 2002 | 11 | 7 |
| 2003 | 10 | 6 |
| 2004 | 4 | 4 |
| 2005 | 7 | 8 |
| 2006 | 11 | 12 |
| 2007 | 6 | 7 |
| 2008 | 7 | 14 |
| 2009 | 4 | 5 |
| 2010 | 5 | 15 |
| 2011 | 4 | 6 |
| 2012 | 4 | 4 |
| 2013 | 12 | 7 |
| 2014 | 7 | 3 |
| 2015 | 11 | 16 |
| 2016 | 7 | 7 |
| 2017 | 6 | 3 |
| 2018 | 6 | 6 |
| 2019 | 5 | 6 |
| 2020 | 8 | 4 |
| 2021 | 2 | 1 |
| 2022 | 3 | 4 |
| 2023 | 7 | 3 |
| 2024 | 0 | 10 |
| 2025 | 2 | 3 |
| 2026 | 6 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method of removing defect of mask15 Sep 2026US 12,736,870 B2Samsung Electronics Co., Ltd.
- Grid plate encoder based positioning system and method1 Sep 2026US 12,724,038 B2Nearfield Instruments B.V.
- Probe assessment method and SPM28 Apr 2026US 12,613,257 B2Shimadzu Corporation
- Reference sample suitable to calibrate magnetic microscope's probe tip and calibration method31 Mar 2026US 12,590,988 B1China Jiliang University
- Measurement system with detection mechanism and method of operation thereof24 Mar 2026US 12,584,941 B1Park Systems Corp.
- Method of calibrating a plurality of metrology devices14 May 2026US 2026/0133219 A1ICSPI Corp.
- Method of inspecting tip of atomic force microscope and method of manufacturing semiconductor device6 Nov 2025US 2025/0341540 A1Korea Advanced Institute of Science and Technology
- Scanning probe microscope and method of alignment, focusing, and measurement29 May 2025US 2025/0172585 A1Molecular Vista, Inc.
- Methods for positioning a measurement spot using a scanning probe microscrope22 May 2025US 2025/0164523 A1Oxford Instruments Nanotechnology Tools Limited
- Method and apparatus for scanning a sample with a probe26 Dec 2024US 2024/0426869 A1Infinitesima Limited
Most cited
By later US patents
- High precison calibration and feature measurement system for a scanning probe microscope115US 5,825,670 AAdvanced Surface Microscopy, Inc. · 1998
- High precision calibration and feature measurement system for a scanning probe microscope99US 5,644,512 AAdvanced Surface Microscopy, Inc. · 1997
- Wafer metrology pattern integrating both overlay and critical dimension features for SEM or AFM measurements98US 5,701,013 AMosel Viltelic, Inc. · 1997
- Multiple local probe measuring device and method95US 6,798,226 B2Europaisches Laboratorium fur Molekularbiologie (EMBL) · 2004
- Object inspection and/or modification system and method89US 6,337,479 B12002