Probe assessment method and SPM

A method of assessing a probe by measuring a known sample whose shape is known with the probe in an SPM (Scanning Probe Microscope),

• at least one groove part being formed on a surface of the known sample,
• the groove part having a shape tapered toward a bottom of the groove part;
• the method comprising the steps of:
• measuring a circle equivalent radius of a circle, the circle being defined by approximating a cross-section of the groove part at a position away from a measurement point on the bottom of the groove part in a depth direction by a predetermined distance to a circle;
• comparing the circle equivalent radius of the groove part with a threshold value;
• and
• determining that the probe is satisfactory when the circle equivalent radius is less than the threshold value and determining that the probe is unsatisfactory when the circle equivalent radius is equal to or greater than the threshold value.

An SPM (Scanning Probe Microscope) comprising:

• an observation device having a probe;
• and
• an information processing device,
• wherein the observation device is configured to measure a known sample whose shape is known with the probe and output a measurement signal indicating a result of the measurement to the information processing device,
• wherein at least one projection part is formed on a surface of the known sample,
• wherein the projection part has a shape tapered toward a vertex thereof,
• wherein the information processing device is configured to
• execute measuring processing of measuring a circle equivalent radius of a circle, the circle being defined by approximating a cross-section of the projection part at a position away from a measurement point of the vertex in a height direction by a predetermined distance to a circle,
• execute comparing processing of comparing the circle equivalent radius with a threshold value, and
• execute determining processing of determining that the probe is satisfactory when the circle equivalent radius is less than the threshold value and determine that the probe is unsatisfactory when the circle equivalent radius is equal to or greater than the threshold value.

An SPM (Scanning Probe Microscope) comprising:

• an observation device having a probe;
• and
• an information processing device,
• wherein the observation device is configured to measure a known sample whose shape is known with the probe and output a measurement signal indicating a result of the measurement to the information processing device, a groove part being formed on a surface of the known sample, the groove part having a shape tapered toward a bottom thereof, and
• wherein the information processing device is configured to
• execute measuring processing of measuring a circle equivalent radius of a circle, the circle being defined by approximating a cross-section of the groove part at a position away from a measurement point of the bottom in a depth direction by a predetermined distance to a circle, and
• execute comparing processing of comparing the circle equivalent radius with a threshold value, and
• execute determining processing of determining that the probe is satisfactory when the circle equivalent radius is less than the threshold value and determine that the probe is unsatisfactory when the circle equivalent radius is equal to or greater than the threshold value.