Scanning probe microscope and method of alignment, focusing, and measurement
AssigneeMolecular Vista, Inc.
InventorsWilliam Morrison, Padraic O'Reilly, Derek Nowak
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Abstract
A scanning probe microscope and method of operating the scanning probe microscope selects a preferred focus position of a focused optical beam on a probe of the scanning probe microscope by adjusting a focus position of the focused optical beam on the probe relative to a tip of the probe and then measuring at least one of a response of the probe and optical radiation scattered from the probe as a function of the position of the focused optical beam. The preferred focus position of the focused optical beam on the probe is based on the measuring of the at least one of the response of the probe and the optical radiation scattered from the probe.
Claims20
A method of operating a scanning probe microscope using a focused optical beam on a probe of the scanning probe microscope, the method comprising:
- shining the focused optical beam on the probe of the scanning probe microscope without a presence of a sample to interact with the focused optical beam on the probe;
- adjusting a focus position of the focused optical beam on the probe relative to a tip of the probe;
- measuring at least one of a response of the probe and optical radiation scattered from the probe as a function of the position of the focused optical beam;
- and
- selecting a preferred focus position of the focused optical beam on the probe based on the measuring of the at least one of the response of the probe and the optical radiation scattered from the probe.
A method of operating a scanning probe microscope using a focused optical beam on a probe of the scanning probe microscope, the method comprising:
- shining the focused optical beam on the probe of the scanning probe microscope without a presence of a sample to interact with the focused optical beam on the probe;
- adjusting a focus position of the focused optical beam on the probe relative to a tip of the probe;
- measuring a response of the probe as a function of the position of the focused optical beam;
- and
- selecting a preferred focus position of the focused optical beam on the probe based on the measuring of the response of the probe.
A scanning probe microscope comprising:
- a cantilever with a probe;
- a light source to irradiate the probe with a focused optical beam;
- an optical system to adjust a focus position of the focused optical beam on the probe;
- a dither device connected to the cantilever to drive the cantilever to vibrate;
- an optical detection system to measure a response of the probe with respect to the focused optical beam;
- and
- a control unit connected to the optical system and the optical detection system to select a preferred focus position of the focused optical beam on the probe based on the measured response of the cantilever for different adjusted focus positions of the focused optical beam on the probe.
Dependencies are inferred from the claim text.