G01Q 30/06
For error compensation
Official title: for error compensation
G01Q30/06 (For error compensation) appears on 133 US grants and 129 published applications in this corpus.
Search patents in G01Q- Granted patents
- 133
- Published applications
- 129
- Assignees
- 75
- Inventors
- 300
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 3 | 0 |
| 1992 | 4 | 0 |
| 1993 | 2 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 4 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 4 | 3 |
| 2002 | 3 | 2 |
| 2003 | 1 | 1 |
| 2004 | 2 | 1 |
| 2005 | 3 | 5 |
| 2006 | 3 | 3 |
| 2007 | 3 | 7 |
| 2008 | 6 | 10 |
| 2009 | 5 | 4 |
| 2010 | 4 | 5 |
| 2011 | 3 | 6 |
| 2012 | 5 | 1 |
| 2013 | 5 | 3 |
| 2014 | 2 | 1 |
| 2015 | 4 | 7 |
| 2016 | 3 | 7 |
| 2017 | 7 | 1 |
| 2018 | 6 | 3 |
| 2019 | 2 | 9 |
| 2020 | 7 | 8 |
| 2021 | 6 | 12 |
| 2022 | 12 | 8 |
| 2023 | 10 | 8 |
| 2024 | 3 | 8 |
| 2025 | 2 | 3 |
| 2026 | 3 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Atomic force microscope (AFM) device and method of operating the same8 Sep 2026US 12,730,127 B2Nearfield Instruments B.V.
- Grid plate encoder based positioning system and method1 Sep 2026US 12,724,038 B2Nearfield Instruments B.V.
- System and method for generating and analyzing roughness measurements and their use for process monitoring and control23 Jun 2026US 12,665,160 B2Fractilia, LLC
- Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)4 Mar 2025US 12,241,911 B2Bruker Nano, Inc.
- Active noise isolation for tunneling applications (ANITA)7 Jan 2025US 12,188,960 B2The Penn State Research Foundation
- Method of Dispositioning and Control of a Semiconductor Manufacturing Process10 Sep 2026US 2026/0269176 A1Fractilia, LLC
- Method of Dispositioning and Control of a Semiconductor Manufacturing Process27 Aug 2026US 2026/0253833 A1Fractilia, LLC
- Apparatus and method for identifying target position in atomic force microscope22 Jan 2026US 2026/0023095 A1Park Systems Corp.
- Nanoscale Dynamic Mechanical Analysis Via Atomic Force Microscopy (AFM-nDMA)8 May 2025US 2025/0147066 A1Bruker Nano, Inc.
- Detection of Probabilistic Process Windows27 Feb 2025US 2025/0069843 A1Fractilia, LLC
Most cited
By later US patents
- Scanning probe microscope having scan correction90US 5,210,410 AThe Board of Trustees of the Leland Stanford Junior University · 1993
- Scanning probe microscope having automatic probe exchange and alignment86US 5,705,814 ADigital Instruments, Inc. · 1998
- Method of operating a scanning probe microscope to improve drift characteristics50US 5,081,390 ADigital Instruments, Inc. · 1992
- Drift compensation for scanning probe microscopes using an enhanced probe positioning system49US 5,077,473 ADigital Instruments, Inc. · 1991
- Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof47US 5,107,112 ACanon Kabushiki Kaisha · 1992