Atomic force microscope (AFM) device and method of operating the same

An atomic force microscopy (AFM) device, the device comprising at least one scan head for scanning a sample, the scan head including a probe, the probe comprising a cantilever and a probe tip arranged on the cantilever, wherein the device further comprises:

• a first actuator cooperating with at least one of the scan head or a substrate holder for moving the probe tip and the sample relative to each other in one or more directions parallel to a surface of the sample for scanning of the surface with the probe tip;
• a cantilever deflection detector for measuring a deflection of the cantilever relative to the scan head during said scanning, the detector being arranged for providing an output signal indicative of said deflection;
• and
• a controller configured for receiving and analyzing the output signal from the cantilever deflection detector, for measuring a deflection of the probe and for automatically adapting one or more imaging parameters during said scanning in accordance with information about sample properties near the location of the sample currently being scanned,
• wherein
• the information about sample properties comprises information about the sample obtained prior to said scanning, and the one or more imaging parameters that are adapted during said scanning based on the information obtained prior to said scanning include a force threshold, wherein a relatively high force threshold is selected if information from the region of the current scan position indicates that the current scan point is expected to be within a relatively deep and narrow recess or at a bottom close to a steep wall and a relatively low force threshold is selected if the information from the region indicates a relatively wide recess or wide flat area away from relatively steep and high edges/walls.