Method of operating a scanning probe microscope to improve drift characteristics
AssigneeDigital Instruments, Inc.
InventorVirgil B. Elings
Life of this patent
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Abstract
The invention is a method for operating a Scanning Probe Microscope (SPM) to provide the capability to eliminate the scanner drift that occurs after the scan area is offset within the range of the scanner. The method disclosed comprises applying an offset that is larger than the desired one and then reducing the offset back to the desired value for scanning. The technique has been found to produce good results for both large and small scans.
Claims13
In a device wherein a piezoelectric scanner with drift characteristics has a portion which is moved between laterally displaced first and second positions, the method of operation to minimize effects of piezoelectric scanner drift comprising the steps of:
- a) first moving the piezoelectric scanner portion from the first position to and past the second position to a third position beyond the second position in the same direction from the first position;
- and,
- b) then moving the piezoelectric scanner portion from the third position to the second position.
In a device wherein a piezoelectric scanner with drift characteristics has a portion which is moved between laterally displaced first and second positions, the method of operation to minimize effects of piezoelectric scanner drift comprising the steps of:
- a) moving the piezoelectric scanner portion from the first position towards the second position;
- b) continuing to move the piezoelectric scanner portion overshooting the second position to a third position beyond the second position;
- and,
- c) returning the piezoelectric scanner portion from the third position to the second position.
The method of operating a piezoelectric scanner having drift characteristics in a device wherein the scanner has an end portion moved between laterally displaced first and seconds positions whereby to minimize effects of scanner's drift comprising the steps of:
- a) applying a voltage to the piezoelectric scanner to move the scanner end portion from the first position towards the second position;
- b) further applying a voltage to the piezoelectric scanner to cause the scanner end portion to overshoot the second position and move to a third position beyond the second position;
- and,
- c) applying a voltage to the piezoelectric scanner which will return the scanner end portion from the third position to the second position.
Dependencies are inferred from the claim text.