G01Q 10/04
Fine scanning or positioning
G01Q10/04 (Fine scanning or positioning) appears on 813 US grants and 669 published applications in this corpus.
Search patents in G01Q- Granted patents
- 813
- Published applications
- 669
- Assignees
- 351
- Inventors
- 1,359
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 2 | 0 |
| 1989 | 12 | 0 |
| 1990 | 11 | 0 |
| 1991 | 9 | 0 |
| 1992 | 16 | 0 |
| 1993 | 18 | 0 |
| 1994 | 23 | 0 |
| 1995 | 14 | 0 |
| 1996 | 19 | 0 |
| 1997 | 13 | 0 |
| 1998 | 25 | 0 |
| 1999 | 26 | 0 |
| 2000 | 14 | 0 |
| 2001 | 18 | 9 |
| 2002 | 14 | 29 |
| 2003 | 23 | 12 |
| 2004 | 24 | 29 |
| 2005 | 22 | 27 |
| 2006 | 27 | 45 |
| 2007 | 29 | 36 |
| 2008 | 27 | 37 |
| 2009 | 30 | 30 |
| 2010 | 20 | 35 |
| 2011 | 31 | 38 |
| 2012 | 23 | 20 |
| 2013 | 33 | 21 |
| 2014 | 29 | 17 |
| 2015 | 16 | 36 |
| 2016 | 29 | 22 |
| 2017 | 26 | 33 |
| 2018 | 28 | 35 |
| 2019 | 26 | 30 |
| 2020 | 32 | 23 |
| 2021 | 29 | 17 |
| 2022 | 13 | 22 |
| 2023 | 24 | 17 |
| 2024 | 12 | 23 |
| 2025 | 19 | 17 |
| 2026 | 5 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Atomic force microscope (AFM) device and method of operating the same8 Sep 2026US 12,730,127 B2Nearfield Instruments B.V.
- Indentation head for an indentation instrument16 Jun 2026US 12,656,233 B2Anton Paar Tritec SA
- MEMS nanopositioner and method of fabrication16 Jun 2026US 12,658,825 B2Board of Regents, The University of Texas System
- Automated landing method of a scanning probe microscopy system and scanning probe microscopy system using the same10 Feb 2026US 12,546,800 B2Nearfield Instruments B.V.
- Micro-electromechanical system13 Jan 2026US 12,522,497 B2Technische Universitiit Wien
- Afm device and method1 Oct 2026US 2026/0298972 A1Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Multi-probe atomic force microscopy rotator24 Sep 2026US 2026/0287611 A1Laser Thermal Analysis, Inc.
- Multi-head afm for defect inspection and review24 Sep 2026US 2026/0287612 A1Nearfield Instruments B.V.
- Computer-implemented method and apparatus for processing a sample using a nanomanipulator10 Sep 2026US 2026/0266867 A1
- Method of analyzing a probe tip deflection signal of a scanning probe microscopy system27 Aug 2026US 2026/0251676 A1Nearfield Instruments B.V.
Most cited
By later US patents
- Multi-dimensional capacitive transducer146US 5,869,751 AHysitron, Inc. · 1999
- Scanning probe microscope143US 5,376,790 APark Scientific Instruments · 1994
- Integrated scanning tunneling microscope137US 4,906,840 AThe Board of Trustees of the Leland Stanford Jr. University · 1990
- Magnetic micro-mover103US 5,834,864 AHewlett-Packard Company · 1998
- Kinematic arrangement for the micro-movements of objects101US 4,785,177 AKernforschungsanlage Julich Gesellschaft mit beschrankter Haftung · 1988