Computer-implemented method and apparatus for processing a sample using a nanomanipulator

An apparatus, comprising:

• a sample stage for holding a sample;
• a nanomanipulator comprising a positioning unit and an excitation unit, the positioning unit being configured to move a probe comprising a cantilever and a tip attached thereto, the excitation unit being configured to oscillate the probe based on a driving signal;
• a cantilever deflection detection system configured for detecting deflections of the cantilever;
• a control loop circuitry configured to track a signal relationship between an oscillation of the cantilever detected by the cantilever detection system and a driving signal provided to the excitation unit;
• and
• at least one control unit configured to perform the following steps:
• driving, using the excitation unit, the probe using a resonant driving signal provided by the control loop circuitry while the tip is not in contact with the sample;
• reducing, by the positioning unit, a first distance in a z-direction between the tip and the sample during a first approach phase until at least one first stop condition of a first set of stop conditions is met, wherein the first set of stop conditions comprises detecting a shift in the frequency of the resonant driving signal used during the first approach phase;
• and
• terminating the first approach phase when the at least one first stop condition of the first set of stop conditions is met by deactivating the resonant driving signal.

A computer-implemented method for processing a sample using a nanomanipulator comprising a measuring tip for processing the sample and a positioning unit for moving the measuring tip, wherein the sample is arranged on a sample stage, and an x-direction and a y-direction of the nanomanipulator are each arranged parallel to a main extension plane of the sample and/or sample stage and perpendicular to one another, the method including the following steps:

• 1a) controlling the positioning unit to move the measuring tip in the y-direction such that an apex of the measuring tip is in contact with a surface of a test region of the sample stage or sample, and the measuring tip leaves a first track on the surface,
• 1b) controlling the positioning unit to move the measuring tip in the x-direction such that the apex of the measuring tip is in contact with the surface, and the measuring tip leaves a second track on the surface,
• 1c) controlling an image recording device to record at least one image of the test region in each case, the first and the second track being at least partially captured accordingly therein, and
• 1d) ascertaining an x-position of the apex of the measuring tip in relation to the x-direction on the basis of the first track captured in the at least one image and ascertaining a y-position of the apex of the measuring tip in relation to the y-direction on the basis of the second track captured in the at least one image.