G01Q 10/045
Self-actuating probes, i.e. wherein the actuating means for driving are part of
Official title: {Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe}
G01Q10/045 (Self-actuating probes, i.e. wherein the actuating means for driving are part of) appears on 121 US grants and 118 published applications in this corpus.
Search patents in G01Q- Granted patents
- 121
- Published applications
- 118
- Assignees
- 94
- Inventors
- 280
- Latest grant
- 13 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 2 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 2 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 4 | 0 |
| 2000 | 3 | 0 |
| 2001 | 3 | 2 |
| 2002 | 3 | 4 |
| 2003 | 6 | 1 |
| 2004 | 1 | 1 |
| 2005 | 1 | 3 |
| 2006 | 3 | 3 |
| 2007 | 1 | 4 |
| 2008 | 1 | 4 |
| 2009 | 1 | 2 |
| 2010 | 3 | 4 |
| 2011 | 2 | 8 |
| 2012 | 3 | 4 |
| 2013 | 6 | 5 |
| 2014 | 9 | 2 |
| 2015 | 3 | 11 |
| 2016 | 6 | 3 |
| 2017 | 6 | 10 |
| 2018 | 5 | 5 |
| 2019 | 3 | 6 |
| 2020 | 9 | 10 |
| 2021 | 9 | 3 |
| 2022 | 1 | 8 |
| 2023 | 9 | 3 |
| 2024 | 2 | 5 |
| 2025 | 3 | 5 |
| 2026 | 1 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Micro-electromechanical system13 Jan 2026US 12,522,497 B2Technische Universitiit Wien
- Micro-optomechanical system and method for the production thereof22 Apr 2025US 12,282,040 B2Karlsruher Institut für Technologie
- Scattering-type scanning near-field optical microscopy with Akiyama piezo-probes11 Mar 2025US 12,247,998 B2The Research Foundation for The State University of New York
- Method and metrology tool for determining information about a target structure, and cantilever probe28 Jan 2025US 12,209,994 B2ASML Netherlands B. V.
- Automated optimization of AFM light source positioning6 Aug 2024US 12,055,560 B2Oxford Instruments Asylum Research Inc
- Atomic force microscope using a single light source to drive cantilever vibrations and sense cantilever motions13 Aug 2026US 2026/0235642 A1Molecular Vista, Inc.
- Micromechanical beam25 Jun 2026US 2026/0176128 A1Nano Analytik GmbH
- Method for forming micro-pattern on surface of product, and product having micro-pattern formed thereon by applying method18 Sep 2025US 2025/0289258 A1Hankuk University of Foreign Studies Research & Business Foundation
- Atomic Force Microscope Based Infrared Spectroscopy With Multiple Laser Pulse Repetition Rate Excitation And Optional Force Volume Operation18 Sep 2025US 2025/0290948 A1Bruker Nano, Inc.
- Scanning probe microscope21 Aug 2025US 2025/0264497 A1Infinitesima Limited
Most cited
By later US patents
- Integrated scanning tunneling microscope137US 4,906,840 AThe Board of Trustees of the Leland Stanford Jr. University · 1990
- Atomic force microscope for high speed imaging including integral actuator and sensor99US 5,883,705 AThe Board of Trustees of the Leland Stanford Jr. University · 1999
- Vibrating probe for a scanning probe microscope91US 6,075,585 AThe Board of Trustees of the Leland Stanford Jr. University · 2000
- Method of making an integrated scanning tunneling microscope78US 5,129,132 AThe Board of Trustees of the Leland Stanford Jr. University · 1992
- Micro-fabricated device with integrated electrostatic actuator59US 5,801,472 AHitchi, Ltd. · 1998