Micro-optomechanical system and method for the production thereof

A micro-optomechanical system, comprising

• at least one optical subsystem configured for emitting at least one optical actuator signal and for receiving at least one optical sensor signal;
• at least one optomechanical structure which is produced from a photoresist in direct contact with the optical subsystem by means of a direct writing microstructuring method, wherein the direct writing microstructuring method is an additive method, wherein the optomechanical structure comprises at least one optical actuation element and at least one optical sensor element,
• wherein the optical actuator signal in interaction with the optical actuation element is configured for changing a mechanical state of the optomechanical structure, wherein the optical sensor signal in interaction with the optical sensor element is configured for detecting the change in the mechanical state of the optomechanical structure or a variable related thereto, and wherein the optical actuation element and the optical sensor element are integrated in the optomechanical structure to form an inseparable unit;
• wherein the optical subsystem has a facet;
• wherein the optical sensor element has a freeform mirror, wherein the freeform mirror is positioned at a free end of the optomechanical structure;
• wherein the optical actuation element includes a heating location on the optomechanical structure where the optical actuator signal impinges to heat the optical actuation element to cause movement, wherein the heating location is positioned proximal to a fixed end of the optomechanical structure that is opposite to the free end;
• and
• wherein the optomechanical structure has a tip, wherein the tip is located at the free end of the optomechanical structure, wherein the tip extends from a side of the optomechanical structure that is opposite to the facet to be in proximity to a sample to be examined, wherein the tip is made of the same material as the optomechanical structure, wherein the tip is produced at the same time with the optomechanical structure to be integral with the optomechanical structure.