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US 12,055,560 B2Granted
Automated optimization of AFM light source positioning
AssigneeOxford Instruments Asylum Research Inc
InventorsJason Bemis, David Aue, Aleksander Labuda
Life of this patent
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Abstract
An atomic force microscope is provided having a controller configured to store one or more positional parameters output by a sensor assembly when a light spot is located at a first preset position on the surface of the cantilever. The controller is further configured to operate an actuator assembly so as to induce movement of the spot away from the first preset position, to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate an optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position.
Claims20
An atomic force microscope, comprising:
- a probe having a cantilever with a tip;
- a sample holder configured to position a sample that can be measured with the tip of the cantilever;
- an actuator assembly configured to move the cantilever relative to the sample holder;
- a first light source arranged to emit a first beam of light having a first wavelength onto a surface of the cantilever, the first beam forming a first spot on the surface of the cantilever;
- a second light source arranged to emit a second beam of light having a second wavelength, the second beam forming a second spot for inducing photothermal motion of the cantilever;
- an optical assembly configured to adjust the position of the first spot and the second spot;
- a sensor assembly comprising a photodetector and a camera, the photodetector for monitoring light of the first wavelength that is reflected from the surface of the cantilever and measuring deflections of the cantilever from the monitored light of the first wavelength, and the camera for acquiring an image of the surface of the cantilever, wherein the sensor assembly is configured to output one or more positional parameters indicative of the position of the first spot on the surface of the cantilever, and wherein the sensor assembly is configured to output one or more positional parameters indicative of the position of the second spot;
- and;
- a controller configured to store the one or more positional parameters output by the sensor assembly when the first spot is located at a first preset position on the surface of the cantilever, the controller further configured to operate the actuator assembly so as to induce movement of the first spot away from the first preset position, the controller further configured to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate the optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position;
- wherein the controller is configured to store the one or more positional parameters output by the sensor assembly when the second spot is located at a second preset position, the controller further configured to operate the actuator assembly so as to induce movement of the second spot away from the second preset position, the controller further configured to detect said movement of the second spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate the optical assembly in response to the detected movement of the second spot to return the second spot to the second preset position;
- and
- wherein the controller is configured to control the position of the first and second spots to preset positions associated with the cantilever, wherein the cantilever is identified using:
- feature recognition of images of the cantilever taken with the camera, user-defined input or deduction made from AFM observables.
10 more elements
A method for operating an atomic force microscope, the atomic force microscope comprising:
- a probe having a cantilever with a tip;
- a sample holder configured to position a sample that can be measured with the tip of the cantilever;
- an actuator assembly configured to move the cantilever relative to the sample holder;
- a first light source arranged to emit a first beam of light having a first wavelength onto a surface of the cantilever, the first beam forming a first spot on the surface of the cantilever;
- a second light source arranged to emit a second beam of light having a second wavelength, the second beam forming a second spot for inducing photothermal motion of the cantilever;
- an optical assembly configured to adjust the position of the first spot and the second spot;
- a sensor assembly comprising a photodetector and a camera, the photodetector for monitoring light of the first wavelength that is reflected from the surface of the cantilever and measuring deflections of the cantilever from the monitored light of the first wavelength, and the camera for acquiring an image of the surface of the cantilever, wherein the sensor assembly is configured to output one or more positional parameters indicative of the position of the first spot on the surface of the cantilever, and wherein the sensor assembly is configured to output one or more positional parameters indicative of the position of the second spot;
- and;
- a controller configured to perform the method comprising:
- (i) storing in memory one or more positional parameters output by the sensor assembly when the first spot is located at a first preset position on the surface of the cantilever and when the second spot is located at a second preset position;
- (ii) moving the cantilever relative to the sample holder so as to induce movement of the first spot and the second spot away from the first preset position and the second preset position respectively;
- (iii) detecting said movement of the first spot and the second sport based on a change in the one or more positional parameters output by the sensor assembly;
- and
- (iv) operating the optical assembly in response to the detected movement of the first spot and the second spot to return the first spot and the second spot to the first preset position and the second preset position respectively;
- wherein the controller is configured to control the position of the first and second spots to preset positions associated with the cantilever, wherein the cantilever is identified using:
- feature recognition of images of the cantilever taken with the camera user-defined input or deduction made from AFM observables.
13 more elements
An atomic force microscope, comprising:
- a probe having a cantilever with a tip;
- a sample holder configured to position a sample that can be measured with the tip of the cantilever;
- an actuator assembly configured to move the cantilever relative to the sample holder;
- a first light source arranged to emit a first beam of light having a first wavelength onto a surface of the cantilever, the first beam forming a first spot on the surface of the cantilever;
- a second light source arranged to emit a second beam of light having a second wavelength, the second beam forming a second spot for inducing photothermal motion of the cantilever;
- an optical assembly configured to adjust the position of the first spot and the second spot;
- a sensor assembly comprising a photodetector and a camera, the photodetector for monitoring light of the first wavelength that is reflected from the surface of the cantilever and measuring deflections of the cantilever from the monitored light of the first wavelength, and the camera for acquiring an image of the surface of the cantilever, wherein the sensor assembly is configured to output one or more positional parameters indicative of the position of the first spot and the second spot;
- and
- a controller configured to:
- store the one or more positional parameters output by the sensor assembly and operate the actuator assembly so as to control the position of the first and second spots using one or more of:
- feature recognition of images of the cantilever taken with the camera, prior knowledge of the cantilever shape and associated preset positions for the spots, and user-defined input information on the specific AFM application.
8 more elements
Dependencies are inferred from the claim text.