Micro-electromechanical system

A micro-electromechanical system (1) comprising:

• a sensor device (2) comprising a measuring deformer (3) configured to measure a physical quantity, wherein the measuring deformer (3) is mechanically movable to measure the physical quantity, wherein the measuring deformer (3) in a first state exhibits thermal fluctuations corresponding to an effective temperature T1;
• and
• a high-frequency resonator (4) mechanically coupled to the sensor device (2), wherein by means of the coupling the high-frequency resonator (4) can interact with the measuring deformer (3) of the sensor device (2),
• wherein the high-frequency resonator (4) is configured as a mechanical high-frequency resonator (4),
• wherein the micro-electromechanical system (1) includes an energy converter (7) that is operatively connected to the high-frequency resonator (4), wherein the energy converter (7) is configured so that the high-frequency resonator (4) can be excited into a first vibration state by the energy converter (7), wherein the high-frequency resonator (4) has a transition frequency in the excited first vibration state, and
• wherein, through the interaction of the high-frequency resonator (4) vibrating at the transition frequency with the measuring deformer (3) of the sensor device (2), energy can be transferred from the measuring deformer (3) to the high-frequency resonator (4) in such a manner that the measuring deformer (3) after the energy transfer exhibits a second state in which the measuring deformer (3) exhibits thermal fluctuations corresponding to an effective temperature T2 lower than T1.