Vibrating probe for a scanning probe microscope
AssigneeThe Board of Trustees of the Leland Stanford Jr. University
InventorsStephen Charles Minne, Calvin F. Quate, Scott Manalis
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Abstract
A probe for a scanning probe microscope includes a cantilever having a length defined between a free end and a base end. The base end is connected to a support. The free end includes a sharp tip, and is free to oscillate at a selected frequency. The probe also includes a knife-edge structure that is positioned adjacent to the cantilever and perpendicular to the length of the cantilever. The knife edge inhibits the cantilever from vibrating at a first-order resonant frequency of the cantilever, and instead encourages the cantilever to vibrate at third or higher order resonant frequencies.
Claims25
A structure comprising:
- (a) a support;
- (b) a cantilever having a length defined between a free end and a base end, the base end connected to the support;
- and
- (c) a knife-edge structure including a knife edge positioned adjacent to the cantilever and perpendicular to the length of the cantilever.
A structure comprising:
- (a) a support;
- (b) a cantilever having a length defined between a free end and a base end, the base end connected to the support;
- (c) a knife-edge structure including a knife edge positioned adjacent to the cantilever and perpendicular to the length of the cantilever;
- and
- (d) an electrode, connected to the support, in parallel with and opposite a surface of the cantilever.
A structure comprising:
- (a) a silicon support including a knife-edge structure defining a knife edge;
- (b) a layer of silicon dioxide formed over a portion of the support;
- (c) a cantilever including a layer of silicon, the cantilever having a length defined between a free end and a base end, the base end connected to the support via the silicon dioxide;
- and
- (d) an actuator, connected to the base end of the cantilever, for vibrating the cantilever;
- (e) wherein the knife edge is positioned adjacent to the cantilever and perpendicular to the length of the cantilever.
Dependencies are inferred from the claim text.