Multi-head afm for defect inspection and review

2:

• The method of inspecting and reviewing defects according to claim 1, wherein in the first scanning mode the at least one first scanning head move relative to a surrounding of the scanning probe microscope while the substrate remains stationary relative to the surrounding.

3:

• The method of inspecting and reviewing defects according to claim 1, wherein in the second scanning mode the at least one second scanning head remains stationary relative to the surrounding while the substrate moves relative to the surrounding;
• or
• wherein in the second scanning mode the probe of the at least one second scanning head is moved relative to the surrounding of the scanning probe microscope, while both the substrate and the at least one second scanning head remain stationary relative to the surrounding.

4:

• The method of inspecting and reviewing defects according to claim 1, wherein the probe tip of the at least one first scanning head of the multiple scanning heads is of a first tip type and wherein the probe tip of the at least one second scanning head of the multiple scanning heads is of a second tip type, wherein the second tip type is sharp compared to the first tip type.

5:

• The method of inspecting and reviewing defects according to claim 1, wherein the first scanning mode is used to identify potential defects and wherein the second scanning mode is subsequently used to verify if the potential defects are defects.

6:

• The method of inspecting and reviewing defects according to claim 1, wherein scanning in the first scanning mode comprises inspecting the substrate and wherein scanning in the second scanning mode comprises reviewing defects found during the first scanning mode.

8:

• The scanning probe microscope according to claim 7, further comprising moving means for moving, in a first scanning mode, the at least one first scanning head relative to a surrounding of the scanning probe microscope, while maintaining the substrate carrier stationary relative to the surrounding.

9:

• The scanning probe microscope according to claim 7, further comprising moving means for moving, in a second scanning mode, the substrate carrier relative to a surrounding of the scanning probe microscope, while maintaining the at least one second scanning head stationary relative to the surrounding.

10:

• The scanning probe microscope according to claim 7, wherein the at least one second scanning head further comprises moving means for moving, in the second scanning mode, the probe tip relative to a surrounding of the scanning probe microscope, while maintaining the substrate carrier stationary relative to the surrounding.

11:

• A non-transitory computer readable medium comprising instructions which, when executed by a processor of a scanning probe microscope, cause a controller of the scanning probe microscope to perform a method according to claim 1.