Multi-dimensional capacitive transducer
AssigneeHysitron, Inc.
InventorWayne A. Bonin
Life of this patent
Estimating the term…
Abstract
High precision force imparting and/or a force (including weight) and displacement measuring/indicating device which includes a multi-dimensional capacitor transducer system. The multi-dimensional transducer includes a first capacitive transducer for imparting force or movement and/or detecting force, weight or position in a first direction and a second capacitive transducer for imparting force or movement and/or detecting force, weight or position in a second direction. The multi-dimensional transducer may be used to provide in situ imaging in micro-mechanical test systems.
Claims26
A high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein.
A high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further wherein the first means for imparting force or movement and/or detecting force, weight, or position in a first direction operates within a first range of forces, and wherein the second means for imparting force or movement and/or detecting force, weight, or position in the first direction operates in a second range of forces different from the first range of forces.
A high precision transducer comprsing:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising means for maintaining each pick-up plate relatively parallel to each other during movement of the pick-up plate.
A high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising:
- a tip mechanism;
- and
- means for coupling each pick-up plate to the tip mechanism.
In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein.
In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further wherein the first means for imparting force or movement and/or detecting force, weight, or position in a first direction operates within a first range of forces, and wherein the second means for imparting force or movement and/or detecting force, weight, or position in the first direction operates in a second range of forces different from the first range of forces.
In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising means for operably coupling the first capacitive transducer pick-up plate to the second capacitive transucer pick-up plate.
In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising means for maintaining each pick-up plate relatively parallel to its respective drive plate during movement of the pick-up plate.
In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising means for maintaining each pick-up plate relatively parallel to each other during movement of the pick-up plate.
In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein further comprising:
- a tip mechanism;
- and
- means for coupling each pick-up plate to the tip mechanism.
Dependencies are inferred from the claim text.