G01N 2223/6462
Microdefects
Official title: microdefects
G01N2223/6462 (Microdefects) appears on 45 US grants and 63 published applications in this corpus.
Search patents in G01N- Granted patents
- 45
- Published applications
- 63
- Assignees
- 43
- Inventors
- 215
- Latest grant
- 14 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2012 | 0 | 1 |
| 2013 | 0 | 1 |
| 2014 | 2 | 1 |
| 2015 | 1 | 4 |
| 2016 | 0 | 1 |
| 2017 | 4 | 6 |
| 2018 | 1 | 4 |
| 2019 | 5 | 6 |
| 2020 | 5 | 7 |
| 2021 | 6 | 4 |
| 2022 | 4 | 9 |
| 2023 | 5 | 3 |
| 2024 | 9 | 4 |
| 2025 | 2 | 9 |
| 2026 | 1 | 3 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Methods and systems for x-ray scatterometry measurements employing a machine learning based electromagnetic response model14 Jul 2026US 12,680,970 B2KLA Corporation
- X-ray imaging system and learned model production method12 Aug 2025US 12,385,855 B2Shimadzu Corporation
- Evaluation device7 Jan 2025US 12,188,885 B2Kioxia Corporation
- Defect inspecting system and defect inspecting method26 Nov 2024US 12,154,264 B2Hitachi High-Tech Corporation
- Inspection method, inspection system, and semiconductor fabrication using the same6 Aug 2024US 12,055,861 B2Samsung Electronics Co., Ltd.
- Method for evaluating defect position in depth direction of wafer18 Jun 2026US 2026/0168944 A1Shin-Etsu Handotai Co., Ltd.
- Defect inspection system and defect inspection method18 Jun 2026US 2026/0168966 A1Hitachi Power Solutions Co., Ltd.
- X-ray inspection apparatus and x-ray inspection system11 Jun 2026US 2026/0160712 A1Rigaku Corporation
- Sample preparation for charged particle beam imaging25 Dec 2025US 2025/0391709 A1
- Systems and methods of defect detection by voltage contrast imaging27 Nov 2025US 2025/0362254 A1ASML Netherlands B. V.
Most cited
By later US patents
- Object production using an additive manufacturing process and quality assessment of the object20US 9,764,517 B2BAE SYSTEMS plc · 2017
- X-ray dark-field in-line inspection for semiconductor samples14US 11,175,243 B1Sigray, Inc. · 2021
- Image contrast in X-ray topography imaging for defect inspection13US 10,816,487 B2Bruker Technologies Ltd. · 2020
- X-ray topography apparatus10US 9,658,174 B2Rigaku Corporation · 2017
- Using multiple sources/detectors for high-throughput X-ray topography measurement6US 9,726,624 B2Bruker Jv Israel Ltd. · 2017