X-ray dark-field in-line inspection for semiconductor samples

An x-ray imaging/inspection system comprising:

• an x-ray source comprising a plurality of sub-sources in thermal communication with a substrate and that are configured to emit x-rays when bombarded by electrons configured to generate x-rays by electron bombardment of the target material;
• a first grating positioned to receive at least some of the x-rays from the x-ray source, the first grating comprising periodic structures configured to absorb at least some of the x-rays received from the x-ray source;
• a stage configured to hold a sample positioned to receive at least some of the x-rays from the x-ray source, the sample configured to scatter and emit a first portion of the x-rays and to emit without scattering a second portion of the x-rays;
• at least one x-ray detector;
• and
• a second grating positioned to receive at least some of the first portion of the x-rays and at least some of the second portion of the x-rays, the second grating comprising periodic structures configured to substantially block transmission of the second portion of the x-rays from reaching the at least one x-ray detector while substantially allowing transmission of the first portion of the x-rays to the at least one x-ray detector,
• wherein the x-ray source, the first grating, and the second grating are configured such that a ratio of a pitch p0 of the plurality of sub-sources to a pitch p2 of the periodic structures of the second grating is substantially equal to a ratio of a distance dS-G1 between the plurality of sub-sources and the first grating and a distance dG1-G2 between the first grating and the second grating:
• (p0/p2)=(dS-G1/dG1-G2), wherein the second grating is positioned such that x-rays that directly propagate from the x-ray source and that are collimated by the first grating are substantially blocked by the second grating from reaching the at least one x-ray detector, while scattered x-rays from the sample are not substantially blocked by the second grating from reaching the at least one x-ray detector.