X-ray topography apparatus

An X-ray topography apparatus that uses X-rays for form two-dimensional images in correspondence with an internal structure of a sample, comprising:

• an X-ray source that produces X-rays with which the sample is irradiated;
• a multilayer film mirror provided in a position between the sample and the X-ray source;
• a slit member provided in a position between the sample and the X-ray source and including a slit that limits a width of the X-rays;
• two-dimensional X-ray detection means for two-dimensionally detecting X-rays having exited out of the sample;
• and
• sample moving means for achieving stepwise movement of the sample relative to the X-rays with which the sample is irradiated to sequentially move the sample to a plurality of step positions, wherein:
• the X-ray source produces the X-rays from a minute focal spot,
• the multilayer film mirror converts the X-rays emitted from the X-ray source into monochromatic, collimated, high-intensity X-rays,
• the direction in which the multilayer film mirror collimates the X-rays coincides with a width direction of the slit of the slit member,
• the step size by which the sample moving means moves the sample is smaller than a width of the slit, and
• the combination of the size of the minute focal spot, the width of the slit, and the intensity of the X-rays that exit out of the multilayer film mirror allows the contrast of an X-ray image produced when the two-dimensional X-ray detection means receives the X-rays for a predetermined period of 1 minute or shorter to be high enough for observation of the X-ray image.