X-ray inspection apparatus and x-ray inspection system

Abstract

An X-ray inspection apparatus and an X-ray inspection system capable of observing a sample using a detector suitable for each application are provided in a single apparatus. An X-ray source for irradiating parallel X-rays with a plate-shaped sample, a sample stage for holding the sample, a plurality of detectors each having a different resolution and detecting a projection image of X-rays transmitted through the sample, a switching mechanism for switching the detectors, and an adjusting mechanism for adjusting an arrangement of each of the detectors independently are comprised, and the adjusting mechanism enables each of the detectors to move in a direction close to or away from the sample along an optical axis of the irradiated X-rays.

Dependencies are inferred from the claim text.